Characterizing Critical Buried Interfaces by Inelastic Background Analysis (IBA) using Lab-Scale Hard X-ray Spectroscopy
Abstract
devices are shrinking while increasing in complexity. The buried interfaces in electronic materials are critical to their functionality but notoriously difficult to characterize. This work aims to expand an existing approach to non-destructive depth profiling of deeply buried interfaces by developing a generic and semi-automated method analyzing the inelastic background of XPS spectra
| Origin | Files produced by the author(s) |
|---|---|
| Licence |
