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Poster De Conférence Année : 2024

Characterizing Critical Buried Interfaces by Inelastic Background Analysis (IBA) using Lab-Scale Hard X-ray Spectroscopy

Taylor Rose Bure
  • Fonction : Auteur
Christine Robert-Goumet
Olivier Renault
Emmanuel Nolot
Thierry Conard

Résumé

devices are shrinking while increasing in complexity. The buried interfaces in electronic materials are critical to their functionality but notoriously difficult to characterize. This work aims to expand an existing approach to non-destructive depth profiling of deeply buried interfaces by developing a generic and semi-automated method analyzing the inelastic background of XPS spectra
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Dates et versions

hal-04628132 , version 1 (28-06-2024)

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Identifiants

  • HAL Id : hal-04628132 , version 1

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Taylor Rose Bure, Christine Robert-Goumet, Olivier Renault, Emmanuel Nolot, Thierry Conard, et al.. Characterizing Critical Buried Interfaces by Inelastic Background Analysis (IBA) using Lab-Scale Hard X-ray Spectroscopy. ECASIA24, Jun 2024, Goteborg Sweden, Sweden. ⟨hal-04628132⟩
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